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display
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Blue backlight, 4 - bit digital display, 10 mm LCD
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The measured parameters
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Ra、Rz、Rq、Rt
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Measuring range
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Ra，Rq：0.005~16.00 um / 0.020~629.9 uinch
Rz，Rt：0.020~160.0 um / 0.078~6299 uinch
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precision
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± 10%
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Indication value variability
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6%
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Sensor
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Measuring principle
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inductive
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The radius
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5 um
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material
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diamond
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load
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4 mN(1.6 gf)
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Angle
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90°
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Longitudinal radius
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48 mm
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Maximum drive stroke
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17.5 mm/ 0.7 inch
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Sampling length (optional)
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0.25 mm，0.8 mm，2.5 mm
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Driving speed
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When measuring
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When sampling length =0.25mm.Vt =0.135 mm/s
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When sampling length=0.8 mm，Vt =0.5 mm/s
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When sampling length =2.5 mm，Vt =1 mm/s
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return
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Vt =1 mm/s
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Filter profile
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Filtered profile
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RC，PC-RC，GAUSS
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Unfiltered profile
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D-P
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Resolution
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0.001 um when value ＜ 10 um
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0.01 um when 10 um ≤ value ≤ 100 um
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0.1 um when value ≥ 100 um
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Evaluation length Ln
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1~5 L optional
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