A local touch PC on the mobile cart provides instant feedback of AMC levels at each monitoring location. Facility Net software provides data storage and graphical displays in real-time while monitoring the specific environment.
Onboard, chemically filtered, clean dry air (CDA) and vacuum are supplied within the cart enclosure to ensure that the analyzers can sample immediately upon relocation without long analyzer warm-up times incurred by competitive systems.
Features
- High-sensitivity AirSentry II ion mobility spectrometry (IMS) analyzers detect acids, amines, ammonia and chlorides
- Airborne Molecular Contamination Mobile cart – move the system quickly to high-priority sample locations
- Onboard compressor, air-dryer, chemical filter and vacuum pump
- Battery back-up enables uninterrupted sampling, even during transport
- Touch PC and software display real-time and historical concentration data
- Optional wireless data communication
Benefits
- Pinpoint AMC issues in real-time, by identifying airborne molecular contamination sources
- Characterize airborne molecular contamination (AMC) levels in multiple areas of large cleanrooms
- AMC analyzers available where and when needed, to deploy anytime
- Continuous actionable data in the process tool and facility
Applications
- Troubleshooting and spatial identification of airborne molecular contamination sources
- Isolation and verification of AMC events detected by multi-point monitoring systems
- Testing of AMC levels within minienvironments and process tools
- Testing and validation of chemical filtration performance
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