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Spectroscopic Ellipsometer TFProbe IRSE Angstrom Sun Technologies

Mã sản phẩm: TFProbe IRSE
Sử dụng cho Model:
Hãng SX: Angstrom Sun Technologies
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Đặt hàng
Spectroscopic Ellipsometer
Model: TFPROBE IRSE
Hãng: Angstrom Sun Technologies

Yêu Cầu Giá Tốt

Thông tin sản phẩm

- Horizontal sample placement
- Affordable, Low Cost
- Compact design
- Easy to use with Window based software; scientific mode for advanced users and operator mode for routine/daily operations
- Variable Incident angles
- User definable resolution
- Fast measurement based on FTIR technique
- Comprehensive optical constants database and model recipes
- Advanced TFProbe Software allows user to define layers with NK table, dispersion or EMA mixture/composites with index grading, and surface/interface roughness...
- Upgradable and reconfigurable with Various options and accessories
- Michelson interferometer with continuous dynamic alignment for long-term stability
- Long Lifetime Infrared Source

SYSTEM CONFIGURATION:
- Model: TFProbe IRSE
- Light Source: Long Lifetime Polaris™ Infrared Source
- Spectrometer:
   + Michelson interferometer Dual ports output
   + Ge on KBr beamsplitter
   + High-precision HeNe reference laser
   + Continuously variable iris aperture
   + BaF2 coated KBr windows
- Variable Incident angle: 20 – 90 degree at 5-degree interval
- Angle Change Mode: Manual with preset slots
- Polarizing Optics: Motorized Grid IR Polarizers
- Detector: TE-cooled DLaTGS detector with KBr window
- Stage: High Precision Z stage with tilting adjustment
- Sample Plate: 200mm diameter, Horizontal placement
- Communication: USB 2.0
- Computer: Intel i5 processor, 8GB ram and 500GB Hard Drive with Keyboard and Mouse
- Monitor: 22” LCD Monitor
- Software: TFProbe 3.3

Thông số kỹ thuật


- Spectral range : 350 - 7400 cm-1
- Spectral Resolution : 0.5 - 32 cm-1
- Wavelength Precision : Better than 0.01 cm-1
- Scanning Velocity : 0.158 – 6.28 cm/sec
- Spot size : 1 - 5 mm
- Angle of incidence : 20° to 90°, 5o interval
- Measurement time : 5 sec/site to several min, user definable
- Measurement precision : better than 1Å for Thermal SiO2/Si

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