- TC series are thermal mass fl ow controllers, a combination of thermal mass fl owmeter and control valve.
- TC automatically controls the mass fl ow rate of various kinds of gases with high accuracy. General purpose of TC-1000 up to 0.99MPa and high pressure version of TC 2000 up to 10MPa are available.
- WIDE FLOW RANGE : Minimum 0 to 5mL/min(nor), Maximum 0 to 500L/min(nor) (0 to 50mL/min(nor) to 0 to 100L/min(nor) for High pressure version)
- HIGH ACCURACY : ±1% F.S. control accuracy.
- QUICK RESPONSE : 3 sec. response for 98%
- FREE FROM PRESSURE AND TEMPERATURE VARIATION Negligible ZERO and SPAN drift for pressure and temperature.
- HIGH RELIABILITY : Special stainless steel with high anti-corrosive capability is used for solenoid valve actuator. Durable for long time operation.
- HIGH FUNCTION : Theoretically, Mass fl ow measurement.