Thiết bị đo và giám sát nhiệt độ Advanced Energy UV 400, UVR 400
Advanced Energy's UV 400 and UVR 400 pyrometers directly measure wafer surface temperature instead of the traditional susceptor/pocket temperature.
- Wide temperature range (650 to 1300°C) allows coverage of both main buffer growth and MQW growth
- Measure deposition thickness with the additional reflectometer at 635 nm on the UVR 400
- Adjustable emissivity, transmittance, and subrange