Resolutions to 1 nm at 100 m/s
±4 µm over 5 m accuracy at 20 °C
Scale thermal coefficient of expansion at 20 °C: 10.1 ±0.2 µm/m/°C
High accuracy spar scale
Excellent motion control performance
Wide set-up tolerances
Protocols available: BiSS®, Panasonic
Readhead size: 36 x 16.5 x 17.2 mm
Low outgasing for vacuum environments
Less than 10 nm RMS jitter for improved positional stability
±40 nm Sub-Divisional Error for smooth velocity control
Thông số kỹ thuật
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Measuring standard
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RSLA: absolute coded high accuracy stainless steel spar scale
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Readhead size (LxWxH)
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36 mm x 16.5 mm x 14.8 mm
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Scale pitch
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Nominal 30 μm
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Thermal expansion coefficient at 20 °C
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10.1 ±0.2 μm/m/°C
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Accuracy grade at 20 °C
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±1.5 μm up to 1 m, ±2.25 μm up to 2 m, ±3 μm up to 3 m, ±4 μm up to 5 m, (includes slope and linearity), calibration traceable to International Standards
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Scale length
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Some BiSS C protocol variants have limited maximum length
(See data sheet for details)
80 mm to 5 m
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Maximum speed
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(See data sheet for details)
Up to 100 m/s
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Protocols*
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BiSS C
Panasonic
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Resolutions
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BiSS C: 50 nm, 5 nm and 1 nm resolutions
Panasonic: 100 nm, 50 nm and 1 nm resolutions
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Sub-Divisional Error (SDE)
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±40 nm
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Electrical connection
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Up to 10 m cable lengths with flying lead
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Power supply
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5 V ±10%, max 250 mA @ 5 V (terminated)
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Vibration (operating)
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100 m/s2 max @ 55 Hz to 2 000 Hz
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Shock (non-operating)
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1 000 m/s2, 6 ms, ½ sine
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Operating temperature
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0 °C to +75 °C
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Bake-out temperature (non-operating)
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120 °C
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Sealing
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IP30
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Cable construction
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Silver-coated copper braided single screen. FEP core insulation, over tin-plated copper wire.
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