Features
•Capable of measuring ultra-minute flows
Can measure a wide range of flows from ultra-minute flows of 0.5-3ML/MIN to flows of 3-30 L/MIN.
•High precision measurement
High precision measurement of flows is available up to ±2% of full scale (standard specification) or to ±1% of full scale (optional specification).
•Wide variations
A broad range of variations is available in total length, materials of construction, flow rate, pressure, scale, and so forth to meet diverse applications from a variety of fields.
•Capable of measuring all kinds of gases
Practically all kinds of gases can be measured, not to mention those standard (Air, N2, O2, H2, He, Ar and CO2).
•Measurement of water flows also possible
Measurement of full-scale water flows not exceeding 1 L/MIN is also possible. (Dimensions may vary depending upon the specified maximum flow rate.)
Applications
• For integration into your equipment panel
• For flow inspections at laboratory
• For semiconductor manufacturing equipment
• For biotechnology industries
Standard Specifications
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