A unique analyzer solution for the simultaneous monitoring of trace moisture and trace oxygen, the DF-760E is a compact integrated solution for monitoring UHP bulk gases used in the manufacture of integrated circuit boards.
Combining the industry-leading properties of Servomex’s non-depleting Coulometric E-Sensor and robust Tunable Diode Laser (TDL) technology within a single compact unit, the DF-760E measures ultra-low levels contaminant levels of H2 and O2 within background gas blends of N2, H2, He, O2 and Ar (H2O in O2 only).
In offering an exceptionally low, industry-leading Lower Detection Limit (LDL) of 100ppt (H2O) / 45ppt (O2), the DF-760E offers the fast speed of response, unsurpassed stability and immunity from trace acid damage which makes it ideal for quality checking and leak detection in semiconductor FAB applications.