ImagesMaster® PRO 5 Wafer - MTF Measurement of Wafer Level Optics

Tình trạng: Còn hàng

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Key Features

Fastest measurement (less than 1 sec. per lens) of MTF in fixed image plane position
Highest FFL accuracy for spacer thickness determination
Tilt correction function (bow compensation)
Measurement traceable to international standards
Wafer bow measurement
Max wafer diameter up to 8 inch (200 mm)
(on request 12inch 300mm)
Quick, software-controlled wafer alignment
Data processing for next production steps
Operation status light indicator
Easy loading due to kinematic mount and wafer rotation and shift adjustment tool
An assortment of pass and fail criteria allows use of the most suitable criterion for each type of lens
Cleanroom compatibility ISO 5

ImageMaster® PRO 5 Wafer MTF measurement of wafer level optics:

	ImageMaster® PRO 5 Wafer
Optical set up	Infinite-finite conjugates
Max. spatial frequency	400 lp /mm
Accuracy MTF on-axis	1,5 % MTF
Accuracy MTF off-axis	2,5 % MTF
Accuracy EFL (Effective Focal Length)	5 µm
Accuracy FFL (Flange Focal Length)	4 µm (by distance sensor)
Minimum measurement time	1.0 sec / sample
Average measurement time	2.5 sec / sample
Dimensions (height x width x depth)	1350 mm x 1330 mm x 675 mm
Weight	210 kg
Sample holder	Wafer tray
Cleanroom class FS 209 / ISO14644-1	100 / ISO 5