Bronkhorst® model D-6321 Mass Flow Controllers (MFCs) are suited for precise measurement of flow ranges between 0,05…1 ln/min and 0,34…7 ln/min at operating pressures between vacuum and 10 bar (Aluminium) or 20 bar (Stainless Steel). The MFC consists of a proven inline thermal (CTA) mass flow sensor, a precise control valve and a microprocessor based pc-board with signal and fieldbus conversion. As a function of a setpoint value, the flow controller swiftly adjusts the desired flow rate. The instument is IP65 complient and can optionally be equipped with a modern, multi-functional and multi-colour display, with operator buttons on the instrument.
The digital MASS-STREAM™ series is characterized by a high degree of signal integrity and, as an option, up to 8 calibration curves of different gases and process conditions can be memorized in the instrument. In addition to the standard RS232 output the instruments also offer analog I/O. As an option, an on-board interface can be mounted to provide DeviceNet™, PROFIBUS DP, Modbus-RTU or FLOW-BUS protocols.
Proven direct inline CTA sensor (no bypass)
Compact, rugged design (IP65, dust and waterproof)
Less sensitivity to humidity or dirt
Optional with integrated TFT display
Very good price-performance ratio
Thông số kỹ thuật
| Measurement / control system |
| Accuracy (based on calibration with Air at 5 bar (a) and T = 20 °C) |
±2% FS including non-linearity*
±1,5% FS on request* |
| Repeatability |
< 0,2% FS |
| Turndown |
1:20 |
| Type of gases |
almost all gases, compatible with chosen materials |
| Response time sensor |
approx. 0,3 sec. |
| Settling time (controller) |
plus approx. 2 seconds |
| Operating temperature |
0…50°C |
| Temperature sensitivity |
±0.2% Rd/°C (Air) |
| Pressure sensitivity |
±0,3% Rd/bar typical (Air) |
| Control stability |
< 0,2% FS typical |
| Max. Kv-value |
6,6 x 10-2 |
| Leak integrity |
tested < 2 x 10-8 mbar l/s He |
| Attitude sensitivity |
at 90° deviation from horizontal max. error 0,2 % at 1 bar typical N2 |
| Warm-up time |
30 min. for optimum accuracy,
within 30 seconds for accuracy ±4% FS |