Hotline: 0984.843.683 Email: info@ttech.vn  Zalo: 0984.843.683

Monitor for Airborne Molecular Contaminants (AMCs) Tiger-i 2000 HF Tiger Optics

Mã sản phẩm: Tiger-i 2000 HF
Sử dụng cho Model:
Hãng SX: Tiger Optics
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Tình trạng

Tình trạng: Còn hàng

Đặt hàng
State-of-the-art trace gas analyzer for detection & continuous monitoring of hydrogen fluoride (HF) Airborne Molecular Contaminants (AMCs) in semiconductor cleanrooms

Liên Hệ Hỗ Trợ

    • SĐT: 0984 843 683

    • Mail: info@ttech.vn

      • Zalo: 0984.843.683

Thông tin sản phẩm

Applications


Air Quality
Airborne Molecular Contaminants
HF Alkylation Unit Emissions
Research & Development

Performance
Operation range See Detection Capability table
Detection limit (LDL, 3σ or 24 h peak-to-peak) See Detection Capability table
Precision (1σ, greater of) ± 0.75% or 1/3 of LDL
Accuracy (greater of) ± 4% or the LDL
Zero drift None
Speed of response 2 minutes to 80%
Environmental conditions 10°C to 40°C, 30% to 80% RH (non-condensing)
Storage temperature -10° to 50°C
Gas Handling System and Conditions*
Wetted materials Sample gas compatible
Gas connections 1/4" male VCR inlet & outlet
Leak tested to 1 x 10-9 mbar l /sec
Inlet pressure 0 – 15 psig (1 – 2 bara)
Outlet pressure Vacuum (<10 Torr)
Flow rate ∼1 slpm
Sample gases Ambient air, clean dry air (CDA), or N2
Gas temperature Up to 60°C
Dimensions
Standard sensor 8.73" x 8.57" x 23.6" (222 mm x 218 mm x 599 mm)
Sensor rack 8.73" x 19.0" x 23.6" (222 mm x 483 mm x 599 mm)
Weight
Standard sensor 33 lbs (15 kg)
AMC cart (excl. sensors and pumps) 260 lbs (118 kg)
Electrical 0-5 VDC, isolated 4-20mA or 0-20 mA output
Alarm indicators 2 user programmable, 1 system fault, Form C relays
Power requirements 90 – 240 VAC 50/60 Hz
Power consumption 40 Watts max. per sensor
Signal output Isolated 4–20 mA per sensor
User interfaces 5.7" LCD touchscreen, 10/100 Base-T Ethernet, RS-232
  802.11g Wireless (optional), Modbus TCP (optional)
Patents 0.2 ppb


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