Hotline: 0984.843.683 Email: info@ttech.vn  Zalo: 0984.843.683

Ellipsometer MARY-102 Five Lab

Mã sản phẩm: MARY-102
Sử dụng cho Model:
Hãng SX: Five Lab
Xuất xứ
Bảo hành
Tình trạng

Tình trạng: Còn hàng

Đặt hàng
Ellipsometer
Model: MARY-102
Hãng: Five Lab


Liên Hệ Hỗ Trợ

    • SĐT: 0984 843 683

    • Mail: info@ttech.vn

      • Zalo: 0984.843.683

Thông tin sản phẩm

- High analytical power
-Adopting the rotation phase method
 -High repeatability
 - High speed measurement
 - Abundant options


Thông số kỹ thuật

specification Specifications

Measurement method

Rotating retardation method (RQ method) Method Rotating Retarder Method

light source

0.8 mW HeNe laser (λ@632.8 nm) Light 
Source
0.8 mW HeNeLaser (λ@632.8 nm)
Beam diameter 0.8 mmφ Beam Dia 0.8 mmφ
Angle of incidence Automatic variable, manual variable or fixed (optional) 
Automatic 45 ° to 90 ° 
0.01 ° increments
Incident 
Angle

Auto, Manual or Fixed 
Auto (45 ° to 90 °

0.01 ° step)

Sample 
Stage
6 inch size standard (8 ", 12") 
automatic θ - Y type 
manual θ - Y type 
motor drive Z axis 
manual Z axis 
manual tilt mechanism attached
Sample 
Stage
6 "standard (8" & 12 "optional) 
Auto θ - Y  Manual 
θ - Y 
Motor - driven Z - axis 
Manual Z - axis 
Manual tilt control
Measurement accuracy Δ = ± 0.01 ° 
ψ = ± 0.01 ° 
@ SiO 2 (1000 Å) / Si
Accuracy Δ = ± 0.01 ° 
ψ = ± 0.01 ° 
@ SiO 2 (1000 Å) / Si
Measurement time Min 0.05 sec Sample 
Time
0.05 sec minimum
Soft 
ware
Select for research / industrial use Software Choice of Research 
Industrial Control
PC IBM-PC or compatible machine PC IBM-PC compatible
Size 300 W × 400 D × 450 H mm Dimensions 300 W × 400 D × 450 H mm


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