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Stage Stroke (Xx Yy Zz) (Standard):
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300 x 400 x 150mm (11.8 x 15.8x 5.9 in)
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Minimum readout
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0.1 µm
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Maximum work piece weight
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20kg (44.0 lb)
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Measuring accuracy at 20C ±0.5K: U1x U1y
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1.5 + 4L/1000 µm
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Measuring accuracy at 20C ±0.5K: U2xy (Standard)
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2.5 + 4L/1000 µm
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Z-axis guide accuracy
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(1.5+L/150) µm
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Camera
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B/W Progressive Scan camera
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Maximum specimen height (Standard)
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150mm
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Objective 1.5x
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W.D. 24mm, FOV 8 x 6mm to 0.53 x 0.4mm, Z measurement @ 2 sigma 0.6µm
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Objective 3x
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W.D. 24mm, FOV 4 x 3mm to 0.27 x 0.2mm, Z measurement @ 2 sigma 0.35µm
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Objective 7.5x
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W.D. 24mm, FOV 1.6 x 1.2 mm to 0.11 x 0.08mm, Z measurement @ 2 sigma 0.25µm
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Auto Focus
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TTL Through the lens laser and video auto focus
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Power Source
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AC 100 to 240 V ±10%, 50/60 Hz
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Power Consumption
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Approximately 13A
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Dimensions and Weight: main body and table
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1150(W) x 1250(D) x 1980(H) mm, 900kg; 51.1 (W) x 49.2(D) x 80(H) in., 1980 lb
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Dimensions and Weight: controller
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250(W) x 550(D) x 500(H) mm, 20kg; 9.8(W) x 21.7(D) x 19.7(H) in., 44.1lb
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Footprint
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2200(W) x 1250(D) mm; 87(W) x 49.2(D) in; estimate of main unit & computer table
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Host Computer: main unit
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Pentium 4 (Windows® 2000/XP)
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Host Computer: monitor
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19-inch LCD flat panel (standard for USA)
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