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Thiết bị kiểm tra chip điện tử Nanomechanics InForce 50, InForce 1000, InQuest

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Thiết bị kiểm tra chip điện tử Nanomechanics InForce 50, InForce 1000, InQuest


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Thiết bị kiểm tra chip điện tử Nanomechanics InForce 50, InForce 1000, InQuest


InForce 50 Nanomechanical Actuator

The Nanomechanics InForce actuators utilize patent-pending voice-coil force generation and capacitive displacement measurement to achieve the best dynamic range in the industry.
With 50mN of force, the InForce 50 enables a wide range of compressive, tensile and nanoindentation testing. The dynamic characteristics of the head mean that low-noise, stability and closed-loop control are inherent to the design, whether operating in quasi-static or dynamic modes.

Specifications:
• Displacement measurement: capacitive gauge

• Displacement range: 50 microns

• Displacement resolution (electronic): 0.001 nm

• Typical noise < 0.1 nm

• Load application: coil/magnet

• Maximum Load: 50 mN

• Load resolution: 3 nN

• Typical Noise < 50 nN

• Loading column mass: < 150mg

• Typical indenter normal stiffness: 180 N/m

• Damping coefficient: 0.05 N-s/m

• Typical resonant frequency: 140 Hz

InForce 1000 Nanomechanical Actuator

The Inforce 1000 nanomechanical actuator is a force generation mechanism combined with a displacement sensor commonly used for nanoindentation testing. The force is generated electromagnetically. The displacement is sensed capacitively. The specifications are:

• Displacement measurement: capacitive gauge

• Displacement range: 80 microns

• Displacement resolution (electronic): 0.04 nm

• Typical noise < 0.25 nm

• Load application: coil/magnet

• Maximum Load: 1 N

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