Hotline: 0984.843.683 Email: info@ttech.vn  Zalo: 0984.843.683

Tủ sấy CLH Series Koyo Thermo

Mã sản phẩm: CLH Series
Sử dụng cho Model:
Hãng SX: Koyo Thermo
Xuất xứ
Bảo hành
Tình trạng

Tình trạng: Còn hàng

Đặt hàng

High-temperature baking in a clean environment enabled by the heat resistant high-performance filter and unique cooling unit.
A hot-air circulation system is used to highly accurately carry out wafer and glass substrate baking/aging, polyimide curing and annealing.

Liên Hệ Hỗ Trợ

    • SĐT: 0984 843 683

    • Mail: info@ttech.vn

      • Zalo: 0984.843.683

Thông tin sản phẩm

Feature:

A heat resistant high-performance filter and our unique cooling unit are installed to enable high-temperature baking.

This type of ovens is optimal for semiconductor wafer and glass substrate baking, aging and other heat treatments requiring high accuracies.
Inert gases can be introduced into the chambers to use the ovens as inert gas ovens.
The chamber interior can keep class 100 (ISO: Class 5) cleanliness when the temperature is stable.
There are 2 hot-air blow types, front side blow horizontal circulation (type V) and side blow (type III). Both achieve high thermal efficiencies and good temperature uniformity.


CLH series specifications
Cleanness CLASS 100 (ISO: CLASS 5)
(temperature stable time)
Oxygen concentration (Reference) Less than 20ppm
Control System Programmed controller
Shelf plate withstand
(Uniformly-distributed load)
15kg/shelf
Chamber pressure meter 0~2kPa
Filter pressure meter 0~1kPa
Thermocouple K
Exhaust port 1B · ball value
Safety feature Electric leak breaker,
heat protection, motor over-load protection,
control circuit breaker, cooling water flow meter
Standard accessory shelves (with shelf plates)



Type CLH-21CD(III) CLH-21CDH(III) CLH-21CD(V)
Method Convection (Side-flow) Convection rear to front
Max. operation Temperature(*1) 450°C 530°C 500°C
Normal operation Temperature(*1) RT+70~450°C RT+70~530°C RT+70~500°C
Temperature distribution (Reference)(*2) ±5°C(at 450°C) ±8°C(at 530°C) ±5°C(at 500°C)
Heat up time (Reference)(*1) Within 80 minutes (RT+70~450°C) Within 90 minutes (RT+70~530°C) Within 80 minutes (RT+70~500°C)
Cool down time (Reference) Within 90 minutes (450~100°C) Within 100 minutes (530~100°C) Within 90 minutes (500~100°C)
Filter Heat-resistant HEPA filter
Oxygen concentration (Reference) Within 45 minutes (N2·250L/min introduce)
Heater power 33.6kW(at 200V) 21kW(at 200V)
Temperature recorder 1 pen temperature recorder (control point · Thermocouple K)
Outer dimension (mm) 1285(W)×2020(H)×1605(D) 1180(W)×2110(H)×1670(D)
Inside dimension (mm) 670(W)×700(H)×500(D) 700(W)×700(H)×500(D)
(*3)
Equipment weight approx. 1050kg approx. 1100kg
Breaker capacity AC 200V 150A
3ø 50/60Hz
AC 200V 75A
3ø 50/60Hz

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