Benefits
High film quality and throughput
Reduced film, substrate, and equipment damage
Stable throughput and power delivery under extreme arcing conditions
Easy integration and control
Features:
Arc Management System™ (AMS) technology—customer pre-sets for metal and ceramic targets
Set Point Compensation™ technology
Arc Sync® technology—master/slave up to 12 units
Ethernet, EtherCAT®, DeviceNet®, Profibus, RS-232/485, and analog communications
Virtual Front Panel (VFP) software, remote control panel, and passive-display front panel interfaces
RoHS, CE, NRTL, SEMI S2, and SEMI F47 compliance