Maximizes SDS source gas utilization reducing bottle changes resulting in higher tool uptime and lower cost-ofownership
Repeatedly controls low gas flows allowing for reduced gas consumption using parameters optimized for implanter source applications
Digital control loop provides rapid response to set point minimizing process cycle time
Increases tool uptime through reduction of “No Problem Found”: MFC replacements —Included embedded diagnostics and software allowing users to check MFC functionality without removing the MFC —E-diagnostics through embedded Ethernet interface allows monitoring performance parameters during operation
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