Features
- Advanced laser optics and detectors enable 20 nm sensitivity in chemicals
- On-board chemical flow meter to set sample flow
- First particle counter optimized for low and high refractive index chemicals for improved performance:
- Chem 20 sensor, for chemicals with lower indices of refraction
- Chem 20-HI sensor, tailored for sulfuric acid and other higher-index chemicals
- On-board leak detection to provide alarm upon an internal chemical leak
- Low-flow detector and alarm to ensure consistent data
- Bubble detector to optimize data and protect sensor
- Local data display
Benefits
- Detect 20 nm PSL & 9 nm Au particles in real time
- Detect yield-limiting particles (not possible with competitive technologies)
- React quickly to particle excursions long before surface scan or yield data are available
- Optimize chemical delivery systems from the loading dock to point-of-process
- Tighten process control limits through improved sample population statistics
- Optimize instrument operation for very dirty or very clean applications using two view modes, extending product application space
- Support legacy data acquisition systems with flexible communications
Applications
- Real-time particle monitoring within chemical distribution systems
- Point-of-process monitoring
- Chemical packaging operations monitoring
- Chemical filter performance and efficiency characterization
- Performance testing of chemical handling components
|