The LiQuilaz® optical liquid particle counters are volumetric monitors with a variety of sizing sensitivities as low as 0.2 µm. They provide high precision analysis for most process chemicals, including hydrofluoric acid and hot corrosive chemicals up to 306 °F (150 °C). Volumetric particle counters offer the highest precision possible by measuring 100% sample volumes (up to 80 ml/min) so that short sampling intervals can be utilized without sacrificing statistical significance.
Features
- 0.3 -3.0 μm size range
- 80 ± 10% ml/minflow rate
- Compatible with a wide range of process chemicals
- Small footprint for easy placement anywhere in the process
- User-selected particle size threshold
Benefits
- Yield Improvement
- Real-time characterization and analysis of particle contamination allows for immediate response to contamination
- Volumetric measurements provide greater accuracy for tighter process control
- Optional software makes process control easy with alarm settings, status conditions, sampler setup, and online help
- Supports a wide range of applications and fluids
- Works with compression or syringe samplers
- Compatible with various tubing standards
- In-line and batch sampling capabilities
- RS-485 networking compatibility
- Easy to Use
- Small footprint for easy placement anywhere in the process
- Flexible software provides numerous viewing options for real-time or retrieved data
- User-selectable particle size thresholds
Applications
- Effervescent chemical measurements using compression sampling
- Chemical quality assurance
- Process bath monitoring
- DI water monitoring
- Chemical delivery systems
- Photoresist monitoring