In modern cleanroom manufacturing areas, process tools are often spread over large cleanroom areas and multiple floors. Air handlers recirculate the majority of air within a cleanroom which can easily spread airborne molecular contamination to unwanted areas, negatively impacting process steps located away from actual contamination sources. The AirSentry II AMC Monitoring System provides a central and cost-effective monitoring station that allows for rapid contamination detection, as well as monitoring sequences to cover a wide number of sample points spread across a facility. A critical part of a strategic airborne molecular contamination monitoring program.
Features
- Monitors up to 30 sample locations for airborne molecular contamination (AMC)
- Features AirSentry II ion mobility spectrometry (IMS) sensors—sensitive, reliable, repeatable
- Detection of low concentrations of acids, amines, ammonia and chlorides
- Calibrations traceable to the National Institute of Standards and Technology (NIST)
- Real-time graphical software
Benefits
- Low cost-per-sample point
- Detects multiple airborne molecular contamination (AMC) compounds, as specified by the user
- Programmed monitoring to detect AMC events and trends
- Compact size
- Versatile configuration of testing locations
Applications
- Multi-point cleanroom and process bay monitoring for airborne molecular contamination
- Baseline and qualification of AMC levels in new cleanrooms
- Analysis and quantification of chemical filter efficiency
- Characterization of AMC contribution from makeup and recirculation air
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