TR Scan Premium allows the measuring of the most sensitive surfaces with astounding speed and precision. It has become unavoidable in many cases for hi-tech applications, when the traditional measuring by contact has reached its limits. Medical appliances, prosthesis, wafers, MEMS, semiconductors, metallic layers deposits, polymer films, optical components, research and development, quality control, are the areas of expertise of TR Scan Premium.
The heart of the system, Trimos DHM® (Digital Holographic Microscopy), constitutes a derivation of a technology used in the biomedical engineering field. The system itself is basedon the physical characteristics of the hologram for the topography generation of the analysed surface. This technology for checking industrial surfaces is exclusively used by Trimos. Its most distinctive feature to competitive products is the possibility of measuring extreme reflecting, mirror-polished or very small surfaces.
The exceptional high measuring speed coupled with an accuracy range of a nanometre form the main advantages of the TR Scan. Only some microseconds are needed for the acquisition of a three dimensional image (x, y, z) with a million points. This exceptional acquisition speed allows ignoring all problems traceable to vibrations, the traditional enemy of the majority of optical measuring systems. The mentioned advantages prove an enhanced productivity and a limited investment.
- Exceptionnaly fast measuring speed
- Insensitive to vibrations
- Vertical resolution in nanometer range
- Extremely simple positioning thanks to laser pointer (DHM)
- Non-contact and non-destructive measurement
- Software at the top of technology
- Pre-programmed measuring procedures
- Compatible with all 2D and 3D standards
Technical specifications
| TR Scan Premium |
|
101 |
301 |
| Horizontal measuring range X |
mm |
- |
100 |
| Horizontal measuring range Y |
mm |
- |
100 |
| Vertical measuring range Z |
mm |
240 |
| Measuring system resolution XYZ |
µm |
0.1 |
| Positioning accuracy XYZ |
µm |
1 |
| Rectitude of the guideways XY |
µm |
0.3 |
| Max. weight of the part |
kg |
20 |
| Measuring heads |
|
DHM S1 |
DHM S2 |
CCM P1 |
DIA P1 |
| Vertical resolution (Z) |
nm |
0.1 |
0.1 |
8 ÷ 780 |
10 |
| Lateral resolution (XY) |
µm |
0.6 |
0.6 |
0.9 ÷ 14 |
1 |
| Typical measuring range Ra |
µm |
0.4 |
1.6 |
0.012 ÷ 200 |
20 |
| Vertical measuring range |
µm |
3 |
7 |
130 ÷ 24000 |
350 |
| Max. permissible errors Ra |
% |
1% |
1% |
1% ÷ 5% |
5% |
| Repeatability (Ra, 1σ) |
nm |
<0.1 |
<0.1 |
<5 ÷ 25 |
9 |
| Sample reflectivity |
% |
<1% ÷ 100% |
<1% ÷ 100% |
1% ÷ 100% |
- |
| Field of view |
mm |
0.25 x 0.25 |
0.25 x 0.25 |
- |
- |