As surface geometry for storing massive amounts of data has dramatically decreased, particle monitoring for microelectronics manufacturers has become increasingly important. MET ONE 3411 portable air particle counters are designed to meet the unique demands of semiconductor cleanroom monitoring, process benchmarking and particle troubleshooting applications.
With industry leading ISO 21501 accuracy, the compact MET ONE 3411 is the cleanest 0.1 μm portable air particle counter available for monitoring and resolving particle excursion events.
0.1 micron sensitivity (range 0.1 μm-1.0 μm)
21501 compliant for guaranteed unit-to-unit accuracy & reproducibility
Sequential sampling with optional collector
Fan inactive during operation to minimize particle impact
Simplified interface for area, location & operating parameter configuration/replication
Thông số kỹ thuật
| Channels/Standard Sizes |
6 channels (0.1 µm, 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 5 µm) |
| Light Source |
Helium neon laser |
| Flow Rate |
1.0 CFM (28.3 LPM) |
| Zero Count |
ISO 21501-4 & JIS B 9921 (1 count or less in 5 minutes; 95% Upper Confidence Limit) |
| Coincidence Loss |
% at 1,765,000 particles/m3 (per ISO 21501-4 method) |
| Industry Standards |
ISO 21501-4 , CE |
| Counting Efficiency |
50% at 0.1 μm (100% for particles > 0.15 μm per ISO 21501-4 & JIS B 9921) |
| Count Alarms, Display & Cycles |
User-defined alarm counts, Raw counts: N/CF, N/CM, N/L in cumulative or differential mode |
| Data Storage |
5000 samples |
| Interfaces & Protocols |
RS232, RS485, 802.11 b/g Wireless, 802.3 Ethernet, USB Client (v1.1) & USB Host (v1.1) interfaces, Protocol: Modbus TCP, Modbus RUT, Serial FX |
| Item Specifications Referenced |
2088800-01 |
>>> Gia ban MET ONE HHPC+ Series chinh hang