The Phenom ProX scanning electron microscope (SEM) is based on the 5th generation Phenom desktop SEM platform and is a high-performance SEM for imaging and analysis. With the Phenom ProX desktop SEM, sample structures can be physically examined and their elemental composition determined. Besides point analysis, the optional Elemental Mapping and Line Scan software allows further analysis of the distribution of elements.
The Phenom SEM microscopes are intuitive to use, fast to create results and built to high-quality standards. These core principles have been used to develop and create the Phenom ProX spectroscopy system for best-in-class imaging and analysis.
Compared to its predecessors, the Generation 5 Phenom ProX SEM has at least a 20% better resolution, and an even better user experience to address a wider range of applications, including samples that are very sensitive to beam damage. Fast identification of different chemical elements in a specimen is accomplished with the Element Identification (EID) software package and a specially designed and fully integrated Energy Dispersive Spectrometer (EDS).
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