Since the rotation phase method is adopted, the Δ value is
It can measure with high accuracy over the whole area.
Since it is possible to move only the detector part independently of the incident arm,
It is also possible to measure samples where the optical axis translates.
Data view for easy confirmation of phase difference, ellipticity, and azimuth of each wavelength
Wafer is equipped as standard equipment
Thông số kỹ thuật
| Measurement method |
: Rotating retardation method (RQ method)
* In addition to PCSA optical system (standard), PSCA optical system can also be supported |
| light source |
: 150 W halogen lamp (xenon lamp selectable) |
| Measuring wavelength |
: 380 to 930 nm |
| Beam diameter |
: Approx. 500 μm (in a linear state when using a spot lens) |
| Angle of incidence |
: Reflection measurement 40 to 90 degrees, transmission measurement 40 to 90 degrees |
| stage |
: Θ - 2θ Manual Gonio Stage |
| Measurement accuracy |
: Δ ± 0.05 (°) |
| Measurement time |
: Min 25 seconds (Measurement time varies depending on integration count) |
| Standard size |
: 500 × 1030 × 430 (mm) (depth X width X height)
* Measuring instrument body |
| Standard weight |
: Approximately 130 (kg)
※ Measuring instrument body |
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