Features
Ultra-fast gas flow control (settling time < 100 ms)
High accuracy at lowest flow rates (< 1sccm)
Excellent long-term stability and reliability
No aging effects
Wide dynamic range (turndown ratio 1000:1)
Multigas feature
Attractive price-performance-ratio thanks to CMOSens® Technology
Compact size
Applications
Analytical instruments (e.g. gas chromatography, mass spectrometry, thermal analysis)
Medical devices (e.g. ventilation, anesthesia)
Industrial process automation (e.g. coating, thermal processing)
Semiconductor industry (e.g. plasma etching processes, thin film deposition)