| Liquid Flow Meter |
|
Applications |
Max. flow rate
(calibration medium) |
Interface options (connector) |
Wetted materials |
Specific characteristics |
| SLG |
 |
- Liquid chromatography
- High-pressure/ultra-
low flow Analytical instruments
- Leakage testing
- Microfluidics
|
8 µl/min (H2O) |
RS485, I2C, USB or analog (4-pin M8 male) |
Stainless steel,
PEEK and fused
Silica |
- 3 sensor versions cover different flow ranges
- Max. operating pressure up to 1200 bar (17500 psi)
|
| SLI |
 |
- General process monitoring
- Pump control
- Monitoring of fuel flow
- Lubricants dosage monitoring
- Conformal coating
- Leakage detection
|
5 ml/min (H2O)
80 ml/min (IPA)
|
RS485, I2C, USB or analog (4-pin M8 male) |
Quartz glass, PEEK;
Borosilicate Glass 3.3,
PEEK, FEP |
- 3 sensor versions cover different flow ranges
- IP65 water and dust protection
|
| SLS-1500 |
 |
- Diagnostics
- Analytical instruments
- Biomedical devices
- Industrial automation
- Fuel cells
|
40 ml/min (H2O) |
RS485, I2C, USB or analog (4-pin M8 male) |
PTFE, PEEK, and 904L
high-performance
stainless steel |
|
| SLQ-QT105 |
 |
- High-end semiconductor
process control
- Photoresist dispensing
- Fast dosing operations
|
120 ml/min (IPA) |
RS485, I2C, USB or analog (4-pin M8 male) |
PCTFE, PFA, and
quartz glass |
- For hydrocarbon based liquids only
- High purity quartz and fluoropolymer wetted materials
|
| SLQ-QT500 |
 |
- Process control
- Industrial automation
- High-viscosity applications
- Paint and glue dispensing
- Photoresist dispensing
|
120 ml/min
(H20 and IPA) |
RS485, I2C, USB or analog (4-pin M8 male) |
PFA, and quartz glass
capillary |
- PFA tubes for fluidic connection (6.35 mm / 1/4'' OD, 4.35mm ID)
- High-purity quartz and fluoropolymer wetted materials
|