Features
High accuracy with low flow rates (< 1 sccm)
Excellent accuracy / repeatability (2% / 0.2% of measured value respectively)
Wide dynamic range (turndown ratio 1000:1)
Compact size with downmount connection
Multiple gases and gas recognition
Digital interfaces
Highly configurable
MTBF 169 years - no recalibration required
Applications
Analytical instruments (e.g. gas chromatography, mass spectrometry, thermal banalysis)
Medical devices (e.g. ventilation, anesthesia)
Industrial process automation (e.g. coating, thermal processing)
Semiconductor industry (e.g. plasma etching processes, thin film deposition)