Semiconductor Wafer Temperature Measurement
Non Contact Infrared Thermometer
Automatically Measures Temperature & Emissivity
Temperature Range: 250°C - 1500°C
Temperature Accuracy: ±3°C
6 Spectral Wavelengths Available: 808, 850, 905, 940,
980, and 1550nm
Data Acquisition Rate to 1ms
Digital RS232 PC Interface
Output 70 Readings Per Second to Host PC
Target Spot Sizes From 0.25” and Larger
Fiber Optic Sensor Temperature Measurement
Other Process Applications include Wafer Rotation
Speed and Process Operating Fault Conditions