Thiết bị kiểm tra chip điện tử Nanomechanics InSEM Systems
The InSEM is a tool for characterizing the mechanical properties of surfaces or structures, which is designed to function with sub-nanometer resolution in an in-situ vaccum environment such as an SEM or FIB.
The InSEM is designed to be modular and flexible, to enable a wide range of application. Port availability on SEM/FIB chambers is often an issue. We've designed the InSEM to mount to a variety of ports, or to be mounted directly on the SEM stage. As different applications call for different system configurations, the InSEM can easily be moced from one port to another or assembled into the on-stage configuration.