With the TMS-1200 TopMap µ.Lab, you can characterize microstructures’ surfaces with a very high lateral resolution. The optical profilometer contactlessly determines parameters such as texture, flatness, ripple and roughness on both fine and sensitive structures. The Polytec Smart Surface scanning technology even measures areas of a surface with different reflectivities.
Individual images are stitched together with ease using an optional, motorized XY positioning stage. It is even possible to develop application-specific lenses depending on requirements, such as longer stand-off distances or glass compensation.
Non-contact measurement of microstructures and sensitive surfaces
3D topography measurement and roughness determination with nm resolution
Excellent lateral resolution for rough and reflective surfaces
Smart Surface Scanning technology measures even on high-contrast surfaces
Powerful TMS software, with component recognition as an option
2D and 3D presentation modes with video overlay
Sensor head as stand-alone solution too