The MSA-500 Micro System Analyzer is the all-in-one instrument – the only one of its kind in the world – for static and dynamic 3D characterization of MEMS modules and microstructures. By integrating a microscopic lens with scanning laser Doppler vibrometry, stroboscopic video microscopy and white-light interferometry, this micro system analyzer offers you the ideal all-in-one solution that you can use to extensively analyze vibrating microstructures and their topography. You can quickly identify resonance frequencies and have associated deflection shapes and even transient processes visualized in a reliable and clear manner.
Your premium tool for analyzing MEMS and microstructures
In the event of broadband excitation, you can use the highly sensitive laser vibrometer to swiftly identify all the mechanical resonances (in-plane and out-of-plane) in a single pass without the necessity of any prior information about the component. Perform full-field scans of microscopic components and get undistorted measuring results for the structural dynamics (out-of-plane) at bandwidths of up to 24 MHz. Would you like to examine in-plane vibration behaviour more closely? Then all you have to do is simply use stroboscopic video microscopy in a second step to get information about amplitudes and phases.
Quickly identify and visualize vibration behavior and static topography
Integrated microscopic lens with high lateral resolution and outstanding image quality
Broadband out-of-plane vibration measurement up to 24 MHz
Full-field out-of-plane vibration measurement without moving the sample due to the in-built laser scanner
Stroboscopic video microscopy for an in-plane vibration analysis up to 1 MHz
Import / export options for FE model validation
Easy to integrate in common MEMS probe stations
Fast 2D and 3D topography imaging with subnanometer resolution