- Soft corona preionization
- HV-solid state pulser
- Laser head volume < 3l
- TMC (Total-Metal-Ceramic) Vessel
- Integrated vacuum pump & halogen filter
- Totally air-cooled, active thermal management
- RS-485, RS232, USB and fiber optic Interface for system integration
- Flushable optics holder
- Energy stabilization mode
- Meets European CE-standard
- RoHS compliance
Thông số kỹ thuật
|
ATLEX-500-FBG Specifications
|
|
Gas Medium
|
ArF |
KrF |
Units |
|
Wavelength
|
193 |
248 |
nm |
|
High Voltage Switching Technique
|
Solid State Switch |
|
|
Max. Pulse Energy 1
|
10 |
15 |
mJ |
|
Max. Average Power
|
4.0
|
6.5
|
W
|
| Spatial Coherence (Vertical Beam Direction) |
>300 |
>300 |
µm |
|
Max. Rep Rate
|
500
|
Hz
|
|
Pulse Duration 2
|
5 – 8 |
ns |
|
Beam Dimensions 2 (V x H)
|
4 x 6 |
mm |
|
Beam Divergence 2 (V x H)
|
1 x 2 |
mrad |
|
Energy Stability (standard deviation)
|
< 3 |
% |
|
Dimensions (LxWxH)
|
540 x 470 x 370 |
mm |
|
Weight
|
60 |
kg |
|
Cooling
|
Air |
|
|
Power requirement
|
230 VAC / 6,3 A / 1 phase / 50-60 Hz |
|
|