- Extremely fast pulse rise-time and peak power density
- Laser head volume < 3l
- TMC (Total-Metal-Ceramic) vessel
- Integrated vacuum pump & halogen filter
- Totally air-cooled, active thermal management
- RS-485, RS232, USB and fiber optic interface for system integration
- Flushable optics holder
- Energy stabilization mode
- Meets European CE-standard
- RoHS compliance
Thông số kỹ thuật
|
ATLEX-LR Specifications
|
|
Gas Medium
|
ArF |
Units |
|
Wavelength
|
193 |
nm |
|
Max. Pulse Energy 1
|
12 |
mJ |
| Max. stab. Energy |
10 |
mJ |
|
Pulse Duration 2
|
5 |
ns |
|
Beam Dimensions 2 (V x H)
|
4 x 6 |
mm |
|
Beam Divergence 2 (V x H)
|
1 x 2 |
mrad |
|
Energy Stability (standard deviation)
|
< 2 |
% |
|
Dimensions (LxWxH)
|
540 x 470 x 370 |
mm |
|
Weight
|
60 |
kg |
|
Cooling
|
Air |
|
|
Power requirement
|
230 VAC / 6,3 A / 1 phase / 50-60 Hz |
|
|