40 Micron XY Scanner
| Type |
Modified Tripod |
| XY Linearity |
< 1% |
| XY Range |
> 40 µm |
| XY Resolution |
< 3 nm closed loop
< 0.3 nm open loop |
| XY Actuator type |
Piezo |
| XY Sensor type |
Strain Gauge |
16 Micron Z Scanner / Probe Holder
| Noise |
< 0.2 nm |
| Strain Gauge Resolution |
1 nm |
| Tip Angle |
10 ° |
| Z Linearity |
< 5% |
| Z Linearity-Sensor |
< 1% |
7 Micron Z Scanner / Probe Holder
| Noise |
< 0.12 nm |
| Strain Gauge Resolution |
na |
| Tip Angle |
10° |
| Z Linearity |
< 5% |
Light Lever AFM Force Sensor
| Probe Types |
Industry Standard |
| Probe Insertion |
Manual
Probe Exchange Tool |
| Probe Holding Mechanism |
Clip
Vibrating Mode Piezo
Electrical Connector to Probe |
| Laser/Detector Adjustment Range |
+/- 1.5 mm |
| Adjustment Resolution |
1 µm |
| Minimum Probe to Objective |
25 mm |
| Laser Type |
670 nm Diode, < 3 mW |
| Laser Focus |
<25 µm |
| Detector |
|
| Type |
4 Quadrant |
| Band Width |
> 500 kHz |
| Signals Transmitted |
TL, BL, TR, BR |
| Gain |
Low, High Settings |
| Probe sample angle |
10 degrees |
Digital Data Input Output
| Connection |
USB |
| Scanning DAC |
|
| Number |
2 |
| Bits |
24 |
| Frequency |
7 kHz |
| Control DAC |
|
| Number |
2 |
| Bits |
14 |
| Frequency |
2 kHz |
| ADC |
|
| Number |
8 |
| Bits |
16 |
| Frequency |
48 kHz |
|
|
Z Motion
| Type |
Direct Drive |
| Range |
25 mm |
| Drive Type Stepper |
Motor |
| Min. Step Size |
330 nm |
| Slew Rate |
8 mm/minute |
| Limit Switch |
Top, Bottom |
| Control |
Software – Rate, Step Size |
Analog Electronics
| Vibrating Mode |
|
| Freq Range |
2 kHz – 800 kHz |
| Output Voltage |
10 Vpp |
| Demod. Freq |
TBD |
| Z Feedback |
|
| Type |
PID |
| Bandwidth |
> 3 kHz |
| Sample Hold |
Yes |
| Voltage |
0-150 V |
| XY Scan |
|
| Voltage |
0 – 150 V |
| Bandwidth |
> 200 Hz |
| Pan & Zoom |
22 Bits |
| Tip Approach Cutoff |
< 20 µ sec. |
Software
| Environment |
LabVIEW |
| Operating System |
MS Windows |
| Image Acquisition |
Real Time Display
(2 of 8 channels) |
| Control Parameters |
|
| PID |
Yes |
| Setpoint |
Yes |
| Range |
Yes |
| Scan Rate |
Yes |
| Image Rotate |
0 and 90° |
| Laser Align |
Yes |
| Vibrating Freq. Display |
Yes |
| Force Distance |
Yes |
| Tip Approach |
Yes |
| Oscilloscope |
Yes |
| Image Store Format |
Industry Standard |
| Image Pixels |
16 x 16 to 1024 x 1024 |
| H.V. Gain Control |
XY and Z |
| Real Time Display |
Line Level, Light Shaded,
Grey Color Palette |
| Calibration |
System Window |
| Probe Center |
Yes |
|