| Sample Sizes: |
Up to 1" X 1" X 3/4" |
| Standard Scanning Modes: |
Vibrating(Tapping), Non Vibrating (Contact), Phase, LFM |
| Scanners: |
50 x 50 x 17 µm, 15 x 15 x 7 µm |
| Video Optical Microscope: |
Zoom to 400X, 2 µm resolution |
| Stage and Ebox Size: |
Compact table top design |
50 Micron XYZ Scanner
| Type |
Modified Tripod |
| xy Linearity |
< 1% |
| xy Range |
> 50 µm |
| xy Resolution |
< 3 nm closed loop
< 1 nm open loop |
| xy Actuator type |
Piezo |
| xy Sensor type |
Strain Gauge |
| z Range |
> 16 µm |
| z Linearity |
< 5 % |
| Z sensor noise |
< 1 nm |
| Z feedback noise |
< 0.15 nm* |
| Z Actuator Type |
Piezo |
| Z Sensor type |
Strain Gauge |
15 Micron XYZ Scanner
| Type |
Modified tripod |
| XY Linearity |
< 1% |
| XY Range |
> 15 µm |
| XY resolution |
< 3 nm closed loop
< 0.3 nm open loop |
| XY Actuator type |
Piezo |
| Sensor type |
Strain Gauge |
| Z Range |
> 7 µm |
| Z Linearity |
< 5 % |
| Z sensor noise |
< 5 nm |
| Z feedback noise |
< 0.08 nm* |
| Z Actuator Type |
Piezo |
| Z Sensor type |
None |
Sample Holder
| Type |
Magnet |
| Max Lateral Dimensions |
1" |
| Max. Height |
0.75" |
Light Lever AFM Force Sensor
| Probe Types |
Industry standard |
| Probe insertion |
Manual – probe
exchange tool |
| Probe holding mechanism |
Clip
Vibrating mode piezo
Electrical connector to probe |
| Laser/Detector adjustment range |
+/- 1.5 mm |
| Adjustment resolution |
1 µm |
| Minimum Probe to Objective |
25 mm |
| Laser Type |
670 nm diode, < 1 mw |
| Detector |
|
| Type |
4 quadrant |
| Band Width |
> 500 kHz |
| Signals Transmitted |
TL, BL, TR, BR |
| Gain |
Lo, High Settings |
| Probe sample angle |
10° |
|
50 Micron XYZ Scanner
| Type |
Modified Tripod |
| xy Linearity |
< 1% |
| xy Range |
> 50 µm |
| xy Resolution |
< 3 nm closed loop
< 1 nm open loop |
| xy Actuator type |
Piezo |
| xy Sensor type |
Strain Gauge |
| z Range |
> 16 µm |
| z Linearity |
< 5 % |
| Z sensor noise |
< 1 nm |
| Z feedback noise |
< 0.15 nm* |
| Z Actuator Type |
Piezo |
| Z Sensor type |
Strain Gauge |
15 Micron XYZ Scanner
| Type |
Modified tripod |
| XY Linearity |
< 1% |
| XY Range |
> 15 µm |
| XY resolution |
< 3 nm closed loop
< 0.3 nm open loop |
| XY Actuator type |
Piezo |
| Sensor type |
Strain Gauge |
| Z Range |
> 7 µm |
| Z Linearity |
< 5 % |
| Z sensor noise |
< 5 nm |
| Z feedback noise |
< 0.08 nm* |
| Z Actuator Type |
Piezo |
| Z Sensor type |
None |
Sample Holder
| Type |
Magnet |
| Max Lateral Dimensions |
1" |
| Max. Height |
0.75" |
Light Lever AFM Force Sensor
| Probe Types |
Industry standard |
| Probe insertion |
Manual – probe
exchange tool |
| Probe holding mechanism |
Clip
Vibrating mode piezo
Electrical connector to probe |
| Laser/Detector adjustment range |
+/- 1.5 mm |
| Adjustment resolution |
1 µm |
| Minimum Probe to Objective |
25 mm |
| Laser Type |
670 nm diode, < 1 mw |
| Detector |
|
| Type |
4 quadrant |
| Band Width |
> 500 kHz |
| Signals Transmitted |
TL, BL, TR, BR |
| Gain |
Lo, High Settings |
| Probe sample angle |
10° |
|
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