HIGHLIGHTS MICROPROF® FE
Fully automated 2D and 3D surface metrology for Front-End applications
Multi-sensor technology, based on the MicroProf® 300
Specific inline solution
Wafer Handling Module
Equipment Front End Module (EFEM)
The MicroProf® FE is the standardised, fully-automated 2D / 3D wafer metrology tool. Due to its entirely SEMI conformal metrology solutions as well as nearly maintenance-free hardware components, which allow a high throughput, the MicroProf® FE is the perfect "workhorse" for every Front-End fab. The standard configuration can be enhanced by many optional functions, even as on site upgrade at a later date. Keep pace with the rapid technological development at reduced investment costs - with the MicroProf® FE!