HIGHLIGHTS MICROPROF® FS
Multi-sensor technology and hybrid metrology for MEMS and Foundries
Customisable for a wide range of applications within the Wafer Foundry
Standardised and customer-specific solutions
Greatest possible flexibility
Handling of diverse substrate types
Powerful software for fully-automated 2D and 3D surface metrology
Equipment Front End Module (EFEM)
The MicroProf® FS is a fully-automated wafer metrology tool. It can be configured for a wide range of applications within the Wafer Foundry or the MEMS Fab and uses both standardised and customer-specific solutions. Its enormous versatility makes the MicroProf® FS a real "all-rounder" in the cutting-edge Foundry. That is why we call it the Foundry Star!