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kV range
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30-160 kV
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Max. beam current
|
600 μA
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Max. tube power
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20 W
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Min. feature recognition
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<0.1 μm up to 6W tube power
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Geometric magnification
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up to 2,400x
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Detector
|
3Mpixel (1,944 x 1,536 pixels)
75 μm pixel size
26 fps update rate
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Max. inspection area
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510 × 510 mm
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Max. board size
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580 × 580 mm
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Max. tilt angle
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60°
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Cabinet size
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W: 1,819 mm (excl. operator console)
H: 1,998 mm
D: 1,728 mm
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Vibration isolation
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Anti-vibration mounts (standard)
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Monitor
|
Single 30” or dual 22” display
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X-ray safety
|
1 μSv/hr (to IRR 99)
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|