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Max kv
|
160 kV
|
|
Max. electron beam power
|
20W
|
|
X-ray source
|
Open transmission target tube
|
|
X-ray spot size:
|
1 μm
|
|
Defect recognition capability
|
500 nm
|
|
Geometric magnification
|
2.5x -2,400x
|
|
System magnification
|
Up to 36,000x
|
|
Imaging system (Standard)
|
1.45 Mpixel 12-bit camera with dual field 4"/6" image ntensifier
|
|
Imaging system (Option)
|
Varian 1313 or 2520 Digital flat panel
|
|
Manipulator
|
5-axis
|
|
Rotate axis
|
Included
|
|
Tilt
|
0 - 75 degrees
|
|
Measuring volume
|
Largest square in single map 406x406 mm (16x16")
Absolute max 711x762 mm (28x30")
|
|
Max. sample weight
|
5 kg (11 lbs)
|
|
Cabinet dimensions
(WxDxH )
|
1,225 x 1,810 x 2,145 mm (48x71x84")
(incl. monitor bracket and lamp tower)
|
|
Weight
|
1,935 kg (4,266 lbs)
|
|
Radiation safety
|
<1μSv/hr at the cabinet surface
|
|
Control
|
Inspect-X control and analysis software
|
|
Automated inspection
|
Included
|
|
Computed Tomography
|
Optional
|
|
Primary applications
|
Real-time and automated inspection of electronics (BGA, BGA, flip-chip and loaded PCB boards)
|