Auto-alignment
The fully automated spectroscopic ellipsometry featured by the ellipsometer SENDURO® relieves the user from manually aligning the sample by height and tilt required for highly precise and repeatable spectroscopic ellipsometry. The patented automatic alignment sensor strongly reduces operation errors, works for transparent and reflective samples, and makes automatic maps possible even on bent wafers.
Easy operation
The recipe mode is perfectly suited for routine applications in production, process monitoring as well as R & D. This spectroscopic ellipsometry system comes with a number of ready to use recipes which can be modified for your specific needs.
Step Scan Analyzer principle
The Step Scan Analyzer principle is a unique feature of SENTECH`s spectroscopic ellipsometry. The total time to analyze a sample takes only a few seconds.