The spectroscopic ellipsometer SENpro features simple operation, measurement speed, and combined data analysis of ellipsometric measurements at different angles of incidence. It measures in the spectral range of 370 nm to 1,050 nm. The spectral range of the SENpro in combination with the sophisticated software SpectraRay/4 allows determining thickness and refractive index of single films and complex layer stacks with ease.
The cost-effective, table top SENpro comprises the VIS-NIR ellipsometer optics, 5°-step goniometer, sample platform, laser alignment, fiber coupled stabilized light source, and detection unit. The SENpro comes with the spectroscopic ellipsometer software SpectraRay/4 for system control and data analysis including modeling, simulation, fitting, and presentation of data. Ready-to-use application files make the operation very easy even for beginners. SpectraRay/4 supports computer controlled mapping for uniformity measurements.
The SENpro is focused on speed and accuracy for the measurement of thin films wherever they are applied. Applications range from extreme thin layers of 1 nm to thick layers up to 15 μm.