- Based on the highly successful MM3A-EM micromanipulator, the MM3E exhibits the same compactness, precision, and stability combined with closed-loop positional feedback. This enhancement provides the means to improve the system’s ease of use (e.g. by defining parking and working positions that can be addressed at the click of a button).
- The MM3E is fully compatible with virtually any SEM or FIB/SEM on the market. It comes with an intuitive, drag&drop-style control software which provides an easy means for positioning the tool tip in three dimensions inside your SEM or FIB/SEM tool.
- The software performs coordinate transformations so that the MM3E behaves as a cartesian system with a reproducibility of a few micrometers. With the optional encoded axial rotation drive, the specimen can be rotated compucentrically in the vicinity of the sample.
- Resolution XY: 7 nm
- Resolution Z: 0.5 nm
- Resolution R: < 5e-6° mm
- Reproducibility XYZ: <2 µm
- Drift: <1 nm/min
- compucentric rotation field of view: ~30 µm
- Probing current range: 10 nA to 100 mA
- Maximum probing voltage: 100 V
- Probing signal resistance: 7.0 Ω
- Temperature range: 273 K to 353 K
- Mounting: M4 tapped hole
- Material: Stainless steel, aluminium