Applications
Semiconductor materials, Solar-cell materials (Silicon, Polysilicon, SiC etc)
Silicon-related epitaxial materials, Ion-implantation sample
Chemical compound semiconductor (GaAs Epi, GaN Epi, InP, Ga etc)
Sample sizes
3~8 inch
Measuring range
Thickness: 200 –1200μm
Bow : +/-350μm
Warp: 350μm