Spectroscopic reflectometer mapping system (SRM) is used to obtain uniformity information of film thickness and their optical properties. By measuring reflection spectra (at normal incidence in most cases), film properties can be modeled with capable TFProbe software. If quick, routine, daily measurements on known films or simple film stack are needed in a low budget case, then SRM series is a good choice.
TFProbe series spectroscopic reflectometer mapping tools have many unique feastures, like long working distance, adjustable working distance, various stage for different wafer size applications, selectable light source and adjustable light source intensity, etc.
Angstrom Sun Technologies Inc deliveres our Spectroscopic reflectometer mapping tools with advanced support, There have been many cases that customers upgrade simple SR model tool to SRM which has mapping capability.
Array based detector system to ensure fast measurement
Map film thickness and Refractive Index up to 5 layers
System comes with comprehensive optical constants database and library
Include commonly used recipes
Advanced TFProbe Software allows user to use either NK table, dispersion or effective media approximation (EMA) for each individual film.
Upgradeable to MSP (Microspectrophotometer) mapping system with pattern recognition, or Large Spot for mapping over patterned or featured structure (with Zonerage Model)
Easy to set up and operate with Window based software
Various types of geometry substrate up to 300x300mm or 300mm in diameter
Various types of mapping pattern such as linear, polar, square or arbitrary coordinates
Advanced optics and rugged design for best system performance
Apply to many different type of substrates with different thickness
2D and 3D output graphics and user friendly data management interface with statistical results