Ellipsometry is a technique utilizing polarization state changes after light beam reacts with probing samples. Not like reflectometer, spectroscopic ellipsometer parameters (Psi and Del) are always obtained at non normal incident angles. By varying incident angle. many more data sets can be obtained which wiil be helpful in refining model, reducing uncertainty and improving user's confidence on model's output. Therefore, variable angle ellipsometer is far more powerful than fixed angle ellipsometers. There are two ways to change incident angles, manually or automatically. Ansgtrom Sun technologies Inc designed both angle adjustment models, manually adjusting agnle by moving arms at 5 degree interval following precisely preset slots(manual goniometer, SExxxBM, low cost version), and motorized precision goniometer with 0.01 degree resolution(SExxxBA). In addition, goniometers are engineeringed at vertical layout so samples could be placed horizontally, which is safer when handling samples. With reliable and enough raw data sets, many film properties, like film thickness, its optical constants, interface, porosity and even composition can be obtained through modeling. In this sense, advanced software is a must for high performance SE tools. We developed TFProbe 3.X version software for system setup. simulation, measurement, analysis, data management and 2D/3D graphics presentation. It is all-in-one.
SE300BM is relatively low cost tool among SE series. It covers visible to NIR range (400 to 1100nm) with manual goniometer for incident angle changes at 5 degree interval. This brings a combination of powerful tools with relative low cost, comparing with automatic goniometer configuration(SE300BA). Array based detecting setup gives user a fast measurement, just in seconds. When a mapping or real time in situ measurement is needed, this is the best choice among all SE models. In the product photo, a 300mm motorized mapping stage is equipped. There are several other options available. Please fell free to contact us for any special needs. It's our goal to provide a tool, whatever it is standard configuration or it is customized, to meet your application needs.