Ellipsometry is a technique utilizing polarization state changes after light beam reacts with probing samples. Not like reflectometer, spectroscopic ellipsometer parameters (Psi and Del) are always obtained at non normal incident angles. By varying incident angle. many more data sets can be obtained which wiil be helpful in refining model, reducing uncertainty and improving user's confidence on model's output. Therefore, variable angle ellipsometer is far more powerful than fixed angle ellipsometer systems. There are two ways to change incident angles, manually or automatically. Ansgtrom Sun technologies Inc designed both angle adjustment models, manually adjusting agnle by moving arms at 5 degree interval following precisely preset slots(manual goniometer, SExxxBM, low cost version), and motorized precision goniometer with 0.01 degree resolution(SExxxBA). In addition, goniometers are engineeringed at vertical layout so samples could be placed horizontally, which is safer when handling samples. With reliable and enough raw data sets, many film properties, like film thickness, its optical constants, interface, porosity and even composition can be obtained through modeling. In this sense, advanced software is a must for high performance spectroscopic ellipsometer (SE) tools. We developed TFProbe 3.X version software for system setup. simulation, measurement, analysis, data management and 2D/3D graphics presentation. It is all-in-one.
Robust one click button (Turn-key) solution for quick and routine measurement
Configurable measurement parameters, user preference and easiness of operation
Fully automatic calibration and initialization for system
Precise sample alignment interface from sample signal directly, no external optics needed
Precise height and tilting adjustment
Apply to many different type of substrates with different thickness
Various options, accessories available for special configurations such as mapping stage, wavelength extension, focus spot etc.
Easy to operate with Window based software
Advanced optics design for best system performance
Automatically change incident angles at 0.01 degree resolution
High Power DUV-VIS light source for broad band applications
Array based detector system to ensure fast measurement
Measure film thickness and Refractive Index up to 12 layers
Capable to be used for real time or in-line thickness, refractive index monitoring
System comes with comprehensive optical constants database and library
Advanced TFProbe 3.3.X Software allows user to use either NK table, dispersion or effective media approximation (EMA) for each individual film.
Three different user level control: Engineer mode, system service mode and easy user mode
Flexible engineer mode for various recipe setup and optical model testing
2D and 3D output graphics and user friendly data management interface
Digital Imaging Tool for Micron region selection
Integrated Reflectometer for Reflection measurement over small region