Our SRM300 tool allows you to map film thickness and refractive index up to 5 layers. No need to worry about complicated equipment since the SRM300 is easy to setup and operate. It uses Windows based software, so most people are already familiar with the look and feel of the operating system. This film thickness gauge can handle various types of geometry substrate up to 300mm in diameter and various types of mapping patterns such as linear, polar, square or even arbitrary coordinates. The array based detector system ensures the fastest measurement. With its advanced optics and rugged design you can always be sure to get the best system performance.
Array based detector system to ensure fast measurement
Map film thickness and Refractive Index up to 5 layers
System comes with comprehensive optical constants database and library
Include commonly used recipes
Advanced TFProbe Software allows user to use either NK table, dispersion or effective media approximation (EMA) for each individual film.
Upgradeable to MSP (Microspectrophotometer) mapping system with pattern recognition, or Large Spot for mapping over patterned or featured structure (with Zonerage Model)
Easy to set up and operate with Window based software
Various types of geometry substrate up to 300mm in diameter
Various types of mapping pattern such as linear, polar, square or arbitrary coordinates
Advanced optics and rugged design for best system performance
Apply to many different type of substrates with different thickness
2D and 3D output graphics and user friendly data management interface with statistical results