GFS General Specifications
|
| Power Requirements |
| Balance |
100 to 240 VAC, 50 to 60 Hz, 27 W max. consumption |
| LCM |
100 to 240 VAC, 50 to 60 Hz, 40 W max. consumption |
| MFC-CB |
85 to 264 VAC, 50 to 60 Hz, 36 W max. consumption |
| Operating Temperature Range |
15 to 25 °C |
| Humidity Range |
5 to 70% RH, non-condensing |
| Weight |
| Granite table and stand |
320 kg (700 lb) approximate |
| Rest of system |
70 kg (150 lb) approximate |
| Dimensions |
| Enclosure on Granite Table w/stand |
150 cm H x 90 cm W x 60 cm D (58 in. x 36 in. x 24 in.) |
| LCM |
8 cm H x 22.5 cm W x 20 cm D (3.1 in. x 8.9 in. x 7.9 in.) |
| MFC-CB |
8 cm H x 22.5 cm W x 20 cm D (3.1 in. x 8.9 in. x 7.9 in.) |
| GFS-FS |
20 cm H x 41.4 cm W x 20 cm D (7.9 in. x 16.3 in. x 7.9 in.) |
| Supported Gases |
Nitrogen (N2), Air, Argon (Ar), Carbon Monoxide (CO), Helium (He), Oxygen (O2), Carbon Dioxide (CO2), Carbon Tetrafluoride (CF4), Ethane (C2H6), Ethylene (C2H4), Fluoroform (CHF3), Hexafluoroethane (C2F6), Hydrogen (H2), Methane (CH4), Nitrous Oxide (N2O), Sulfur Hexafluoride (SF6), Xenon (Xe) |
| Flow Measurement Range |
at least: |
| He, H2 |
100 sccm to 10 slm |
| All other gases |
10 sccm to 10 slm |
Pressure Connections
outlet flow path from enclosure |
1/8” Swagelok tube fitting or equivalent, with adaptor to 1/4” Swagelok tube fitting or equivalent |
| Reference Gas Cylinder Pressure Limit |
20 MPa (3000 psi) |
| CE Conformance |
Available, must be specified. |