Aberration Correction Lens (ACL) for superb resolution at any kV or probe current
Gentle Beam (GBSH) Mode reduces effects of lens aberrations at the sample (stage bias)
Ultra-low kV imaging down to 10V
Through-the-lens detector with energy filter for SE/BSE collection
Large specimen chamber with multiple ports
Easy to use intuitive user interface
Unique backscatter detector allows image acquisition even at very low kVs with high resolution
Thông số kỹ thuật
>>> JSM-IT300HR chính hãng
|
Resolution
|
0,7 nm (15 kV), 0,7 nm (1 kV),
3,0 nm (5 kV, WD10 mm, 5 nA)
|
|
Image types
|
Secondary electron image,
Backscaltered electron image
|
|
Acceleration voltage
|
0,01 kV to 30 kV
|
|
Sample bias voltage
|
0 to 5 kV
|
|
Probe current
|
A few pA to ≥ 500 nA,
500 nA @ 30 kV, 20 nA @ 2 kV
|
|
Magnification
|
×25 to ×1.000.000
|
|
Electron gun
|
In-lens-Schottky
Plus field emission electron gun
|
|
Aperture-angle control lens
|
built-in
|
|
Objective lens
|
Super Hybrid Lens
|
|
OL aperture
|
4-stage, X, Y adjustment function
|
|
Automatic function
|
Focus, Astigmatism correction,
brightness, contrast
|
|
Recipe
|
Standard observation conditions, User-defined observation conditions
|
>>> JSM-IT300HR chính hãng