multi-touch screen control and wireless operation
automatic SEM condition setup based on sample type
simultaneous multiple live image and movie capture
high resolution imaging in HV/LV/SE/BSE
chemical analysis with integrated EDS
fast sample navigation at 5x – 300,000x magnifications
Smile View Premium with image sharpening, montaging, position alignment and overlay
Thông số kỹ thuật
Resolution
High Vacuum mode: 3nm (30kV)*, 4nm (20kV), 8nm (3kV), 15nm (1kV)
Low Vacuum mode: 4nm (30kV)*, 5nm (20kV) BSE
Accelerating voltage
0.5kV ∼30kV*
0.5kV ∼20kV
Magnification
x5 to x300,000 (Polaroid reference)
LV detector
Multi-segment BSED (std.)
LV-SED (option)
LV pressure
10 ∼ 100 Pa
Maximum specimen size
Observation：125mm diameter
Loadable：152mm
Height：50mm
LGS type stage
Eucentric goniometer
X=80mm, Y=40mm, Z=5mm-48mm
R=360° (endless)
Tilt -10/+90°
(Computer-controlled 2, 3 or 5-axis motor drive)
Frame Store
Up to 5120×3840 pixels
EDS
Built-in JEOL EDS in IT100A and IT100LA models. Featuring: Spectrum acquisition/display function, Qualitative/quantitative analysis, Line Analysis (horizontal, multi-point), Spectral Mapping, Automatic Drift Compensation
BSE
Standard in IT100LV or IT100LA models
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